IEEE transactions on semiconductor manufacturing : IEEE trans. semicond. manuf.
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Corporate Authors: | , , , , |
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Language: | Inglés |
ISSN: | 0894-6507 1 |
Published: |
New York, N.Y. :
Institute of Electrical and Electronics Engineers,
c1988-
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Online Access: | http://ieeexplore.ieee.org/servlet/opac?punumber=66 |