IEEE transactions on semiconductor manufacturing : a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE...

IEEE transactions on semiconductor manufacturing : IEEE trans. semicond. manuf.

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Dades bibliogràfiques
Autor corporatiu: IEEE Components, Hybrids, and Manufacturing Technology Society., IEEE Electron Devices Society., IEEE Reliability Society., IEEE Solid-State Circuits Council., Institute of Electrical and Electronics Engineers.
Idioma:Inglés
ISSN:0894-6507 1
Publicat: New York, N.Y. : Institute of Electrical and Electronics Engineers, c1988-
Accés en línia:http://ieeexplore.ieee.org/servlet/opac?punumber=66
Descripció
Publicat:Vol. 1, no. 1 (Feb. 1988)-
Descripció de l’ítem:Title from cover.
Descripció física:v. : ill. ; 28 cm.
Available in microfiche and microfilm.
Also issued online.
Periodicitat de publicació:Quarterly
ISSN:0894-6507 1

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