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|a 001891
|b USPS
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035 |
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|a (OCoLC)16152423
|
037 |
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|b IEEE Service Center, 445 Hoes Lane, P.O. Box 1331, Piscataway, NJ 08855-1331
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|a nsdp
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|a 621.3815/2
|2 19
|
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0 |
|
|a IEEE trans. semicond. manuf.
|
222 |
|
0 |
|a IEEE transactions on semiconductor manufacturing
|
245 |
0 |
0 |
|a IEEE transactions on semiconductor manufacturing :
|b a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council.
|
246 |
3 |
|
|a Institute of Electrical and Electronics Engineers transactions on semiconductor manufacturing
|
246 |
3 |
0 |
|a Transactions on semiconductor manufacturing
|
246 |
3 |
0 |
|a Semiconductor manufacturing
|
260 |
|
|
|a New York, N.Y. :
|b Institute of Electrical and Electronics Engineers,
|c c1988-
|
300 |
|
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|a v. :
|b ill. ;
|c 28 cm.
|
310 |
|
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|a Quarterly
|
362 |
0 |
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|a Vol. 1, no. 1 (Feb. 1988)-
|
500 |
|
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|a Title from cover.
|
530 |
|
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|a Available in microfiche and microfilm.
|
530 |
|
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|a Also issued online.
|
710 |
2 |
|
|a IEEE Components, Hybrids, and Manufacturing Technology Society.
|
710 |
2 |
|
|a IEEE Electron Devices Society.
|
710 |
2 |
|
|a IEEE Reliability Society.
|
710 |
2 |
|
|a IEEE Solid-State Circuits Council.
|
710 |
2 |
|
|a Institute of Electrical and Electronics Engineers.
|
856 |
4 |
|
|u http://ieeexplore.ieee.org/servlet/opac?punumber=66
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