IEEE transactions on semiconductor manufacturing : a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE...

IEEE transactions on semiconductor manufacturing : IEEE trans. semicond. manuf.

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Autor corporatiu: IEEE Components, Hybrids, and Manufacturing Technology Society., IEEE Electron Devices Society., IEEE Reliability Society., IEEE Solid-State Circuits Council., Institute of Electrical and Electronics Engineers.
Idioma:Inglés
ISSN:0894-6507 1
Publicat: New York, N.Y. : Institute of Electrical and Electronics Engineers, c1988-
Accés en línia:http://ieeexplore.ieee.org/servlet/opac?punumber=66

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