Materials science in semiconductor processing.

Materials science in semiconductor processing. Mater Sci Semicond Process

Gorde:
Xehetasun bibliografikoak
Hizkuntza:Inglés
ISSN:1369-8001 (Papel)
1873-4081 (Electronic)
Argitaratua: Oxford ; New York : Pergamon, c1998-
Sarrera elektronikoa:http://www.sciencedirect.com/science/journal/13698001
Antzeko dokumentuak:Neurri batean jarraitzen du: Solid-state electronics
Vol. 1, no. 1 and v. 1, no. 2 issued as separately numbered sections in v. 42, no. 5 and v. 42, no. 10 of: Solid-state electronics.