Materials science in semiconductor processing.

Materials science in semiconductor processing. Mater Sci Semicond Process

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Idioma:Inglés
ISSN:1369-8001 (Papel)
1873-4081 (Electronic)
Publicat: Oxford ; New York : Pergamon, c1998-
Accés en línia:http://www.sciencedirect.com/science/journal/13698001
Publicació relacionada:Continua en part: Solid-state electronics
Vol. 1, no. 1 and v. 1, no. 2 issued as separately numbered sections in v. 42, no. 5 and v. 42, no. 10 of: Solid-state electronics.