Materials science in semiconductor processing. Mater Sci Semicond Process
Guardat en:
Idioma: | Inglés |
---|---|
ISSN: | 1369-8001 (Papel) 1873-4081 (Electronic) |
Publicat: |
Oxford ; New York :
Pergamon,
c1998-
|
Accés en línia: | http://www.sciencedirect.com/science/journal/13698001 |
Publicació relacionada: | Continua en part:
Solid-state electronics Vol. 1, no. 1 and v. 1, no. 2 issued as separately numbered sections in v. 42, no. 5 and v. 42, no. 10 of: Solid-state electronics. |